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集散控制系统（Distributed Control System－DCS）集计算机技术、控制技术、通信技术、CRT技术于一体，广泛应用于生产过程控制系统。随着计算机和网络技术的飞速发展，产生了一种新型的控制系统———现场总线控制系统（Fieldbus Control System－FCS）。但国内生产企业的情况是：大多数企业还处于模拟仪表和人工控制的阶段，采用DCS控制系统的企业仍是少数。由于DCS应用广泛、技术成熟，在现有的技术条件和市场条件下，FCS还不能完全取代DCS，而且目前现场总线设备和系统还十分昂贵。因此，除了新建企业外，国内企业在较长时间不可能全面采用现场总线技术，而必须走逐步发展、过渡的道路。 ??我们在上海石化股份公司环保部水质净化厂监控系统的改造项目中，对3个生产单元已有的DCS和PLC进行改造，增加通信功能，实现总调度室对各生产装置的集中监控。 2?系统改造方案?? 根据水质净化厂各生产单元的功能和建设阶段，分为厂外调节池、污水一段、氧化沟、四期污水处理、污泥脱水、污泥干化6个生产单元。另外，在厂部设有总调度室，但是总调度室的监控水平较为落后，改造之前基本上不能对各个生产单元进行监控。为了适应生产需要，提高生产效率，改善操作条件，加强监控手段，确保各生产装置的正常运行，急需对各生产单元和总调度室进行技术和设备的更新改造，从而能在总调度室对各装置进行监视管理，及时了解各装置的运行情况，达到指挥及时和调度准确的目的。 2．1?现场监控系统的改造 ??现场监控系统的改造要充分利用原有仪表和设备，主要考虑可靠性和实时性。首先对自控程度较高的3个单元进行改造（系统结构见图2—1）： ??四期污水处理生产单元控制设备配置了两套ALLEN－BRADELY公司PLC设备。25块开关量输入信号卡，可采集384点信号；7块开关量输出信号卡，可输出112点信号；3块模拟量输入信号卡，可采集24点信号。两套AB—PLC通过DH＋（数据高速通道）实现数据共享。在原有的现场控制计算机上分别增加以太网卡，通过以太网将实时数据送到总调度室处理。??输出192点信号；1块模拟量输入信号卡，可采集8点信号。系统运行采用遥控开关操作与全模拟流程盘显示。在原有的Siemens S5－115UPLC上增加RS－232通讯模块（CP524）和1台现场操作站，用点对点方法连接，使PLC的数据通过现场操作站送到以太网上，与总调度室监控计算机通信。但RS－232传输速率只有9600bps，操作站仅对现场起到监视作用。
6190 FUJIKIN MFC FCS-WR FCSWR-4WS-798-F850#B6383 FUJIKIN MFC FCS-WR FCSWR-4WS-798-F400#B
2623 APPLIED MATERIALS COOLED TUBE, LEAP2 0040-02238
9238 PANASONIC AC SERVO DRIVER MSD011A1X05
20916 APPLIED MATERIALS HARNESS ASSY CIOC TO GP TRANSDUCER 0140-80010
3540 ALLEN-BRADLEY 8-POINT DISCRETE I/O SIMULATOR MODULE 1771-SIM
20876 MATROX PCB ASSY W/ GSP MODULE 0298-06-05, P/N: PG-641, 0296-06-04 PG-1281
7847 DAINIPPON SCREEN EMERGENCY OFF SWITCH BOX 3 HEPT-003
21397 APPLIED MATERIALS ISOLATOR PUMPING RING TOP 200MM PRODUCER 0200-00402
1395 EDWARDS VACCUM PUMP RV12 A655-01-905
4138 DIGITAL ELECTRONICS DC POWER SUPPLY HIGH VOLTAGE DRP-9303DU
18091 YASKAWA MINERTIA SERVO MOTOR, RM SERIES, UTOP1-020MX UGRMEM-01SAKOE
11211 TOKYO ELECTRON PCB, I/O MDIF5B BOARD, 2184-020931-12 TTLM02-11
3239 YAMAMOTO MANOSTAR DIFFERENTIAL PRESSURE SWITCH MS61AHV1.2E-K
3891 VAT GATE VALVE 02109-BA24-ATU1
4712 EMERSON SERVO MOTOR 960104-23 MGE-205-CONS-0000
7475 APPLIED MATERIALS COAX CABLE, DXZ COUNTERMATCH, 2.7M 0150-76322
3435 SUPER VEXTA 5-PHASE-DRIVER UDX5107-G4-2
20597 ADVANTECH PCB, BACKPLANE BOARD, 190K610620 PCA-6106P4
15504 MILLIPORE 22" ION-EX CARTRIDGE CPMB02202
10056 APPLIED MATERIALS CB MAG THERM 3P 240VAC 30A BOLT-ON QO 0680-01215
20153 APPLIED MATERIALS CABLE ASSY,SQS(M)R/A TO SQS(M)STR.W/INTL 0190-21843
4424 APPLIED MATERIALS HDPCVD ESC, 300MM DUAL HE 0040-48594
12520 CTC ANALYTICS MOUNT/BRACKET FOR FAST WASH STATION MR03-00B
8164 SMC PNEUALPHA SOLENOID VALVE ECC-PNAL-6MR-A
14022 USHIO UNI METER UIT-101
22171 OEM 24'' COREFLEX FOR PRODUCER WATER LINE S-COR SS-SC6PF6PF6-24
8395 OEM LAMP MUL-250HS
6040 HORIBA-STEC MFC SEC-E440 MASS FLOW CONTROLLER SEC-E440J
9042 APPLIED MATERIALS MOTOR CURRENT AMP-FILTER CMP (0100-01654)0010-17634
1386 TELEDYNE VACUUM GAUGE TUBE DV-6M-VCR
10391 APPLIED MATERIALS FLANGE, EDWARDS PUMP, CVD EXH SW 0040-21826
15333 ZEISS 960 S.E.M PCB, 348338-2002 348338-9020-2002
T56 MKS VACUUM SWITCH TYPE 141, 1 TORR 141A-22945
2388 WAHL PLATINUM-RTD DIGITAL HEAT-PROBER THERMOMETER 392MVX
12341 ADVANCED ENERGY RF NAVIGATOR RF MATCH 3155126-012
8003 NOR-CAL PNEUMATIC ISOLATION VALVE, KLA-TENCOR ES20XP 990322-2
23385 COMPUTER PRODUCTS POWER SUPPLY FOR FSI XL200-3602/4602
9748 APPLIED MATERIALS CABLE FILAMENT CONTROL 50FT 0620-01281
22186 AXCELIS SOURCE SPACER 170115590
21951 AXCELIS RESOLVER LEAD BACKED PLATE, 10" X 10" 1180750
4793 NEC TFT LCD SCREEN DISPLAY PANEL NL6448BC33-46
3931 VAT ANGLE VALVE 26324-KA41-0001
11783 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000570-11 MC-31151M
14658 RDP TRANSDUCER AMPLIFIER S7AC
22171 OEM 24'' COREFLEX FOR PRODUCER WATER LINE S-COR SS-SC6PF6PF6-24
7568 APPLIED MATERIALS RING CNTRLLC LID 0020-70184
6040 HORIBA-STEC MFC SEC-E440 MASS FLOW CONTROLLER SEC-E440J
12859 PITTMAN SERVO GEAR MOTOR, 24VDC, RATIO 19.7:1, P/N: 12-8882-120 GM9413L144
10391 APPLIED MATERIALS FLANGE, EDWARDS PUMP, CVD EXH SW 0040-21826
3494 NSK ESA SERVO DRIVER ESA-Y3040A25-11
15333 ZEISS 960 S.E.M PCB, 348338-2002 348338-9020-2002
T56 MKS VACUUM SWITCH TYPE 141, 1 TORR 141A-22945
12341 ADVANCED ENERGY RF NAVIGATOR RF MATCH 3155126-012
8003 NOR-CAL PNEUMATIC ISOLATION VALVE, KLA-TENCOR ES20XP 990322-2
11758 AXCELIS LASER ASSY, 334590 01 01 1165740
11818 LS PLC, 16 POINTS RELAY OUTPUT MODULE G6Q-RY2B
7201 EBARA VACUUM PUMP EMERGENCY OFF SWITCH REMOTE A/C BOX 211618
23385 COMPUTER PRODUCTS POWER SUPPLY FOR FSI XL200-3602/4602
22186 AXCELIS SOURCE SPACER 170115590
3974 TOKYO ELECTRON CONTROLLER W/ RKC DIGITAL TEMP CONTROL:REX-D400 3M87-022665
11635 BOSTON GEAR 700 SERIES GEAR SPEED REDUCER, RATIO 20:1, 0.87 H.P. F71820B5J
21951 AXCELIS RESOLVER LEAD BACKED PLATE, 10" X 10" 1180750
4793 NEC TFT LCD SCREEN DISPLAY PANEL NL6448BC33-46
12908 ECHELON PCLTA PC LONTALK ISA-BUS ADPT CARD, PN: 801-0211-01 73100-11
10610 ADVANCED ENERGY PARAMOUNT 3013 RF GENERATOR 3156320-003
11783 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000570-11 MC-31151M
11784 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000571-11 MC-31151T
11782 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000569-11 MC-31151P
14658 RDP TRANSDUCER AMPLIFIER S7AC
17511 ALPHA MOISTURE SYSTEMS DEWPOINT METER DS1000
18772 WATKINS JOHNSON PCB, RS-232 BOARD 961122
19906 KEYENCE PROGRAMMABLE CONTROLLER KV-P16R
19904 FOXBORO 873 RESISTIVITY ANALYZER 873RS-JIPCGZ
8298 A TO Z ELECS PCB MOD SEMVISION CX 300MM OPAL S2DIO
10719 ASML CARBON FILTER 4022.454.5626
4758 PRECISION SENSORS ABSOLUTE PRESSURE SWITCH E36W-H52
17408 LAM RESEARCH TEMPERATURE CALIBRATION SOURCE 518-025348-001
19458 PULNIX CCD CAMERA MODULE TM-7AS
243 EDWARDS EXDC 80 TURBO MOLECULAR PUMP CONTROLLER D39645000
21185 RENISHAW SENSOR OPTICAL ENCODER RGH22 X50F00
T257 MKS BARATRON PRESSURE TRANSDUCER, 10 TORR 628411TAE
2640 VARIAN PCB, DIGITAL I/O RELAY INTERFACE, E14004050 E15004050
22180 VAT MONOVAT DOOR 19X219 ANODIZED LOCKED TO 9Y4C 100404-R1
11839 MAXON MOTOR DC MOTOR W/ENCODER HEDL-5540 A11 223277
1205 SMC E/P REGULATOR IT2020-N02B0
21909 PALL ULTIKLEEN-CDS FILTER 0.05μm ABF1UFD3EH1
1800 STI MCF4200E DIN 081608 2X 2R CABLE WITH NICKEL PLATED 82322-0010
5711 TDK CORPORATION 12VDC POWER SUPPLY RM 12-12RGB
2643 SPAN GAS CYLINDER SCALE AMPLIFIER SAM-305
21184 PFEIFFER TURBO I/F TURBOMOLECULAR CTLR PM C01 713 (REFURBISHED) TC750
18918 APPLIED MATERIALS CABLE ASSY COAX RG-217/U 79FT N(M)/QDS-U 0620-02431
5742 OMEGA HANDHELD METER W/PITOT TUBE HHP 7150
6381 FUJIKIN MFC FCS FCS-4WS-798-F130#D
14182 LAM RESEARCH HOLDING BRAKE WARNER ELECTRIC, ERS-42 853-011141-003
16332 APPLIED MATERIALS INFICON HTR INLINE VLV VIP040-Z 0190-33740
16459 APPLIED MATERIALS CABLE ASSY P54 CHX INLK MANF 0150-25933
B13 PRO-FACE GRAPHIC PANEL GP370-LG11-24V
16468 APPLIED MATERIALS CABLE ASSY CH X GP DNET HUB 0150-25320
16467 APPLIED MATERIALS CABLE ASSY CH Y GP DNET HUB 0150-25322
16457 APPLIED MATERIALS CABLE ASSY P54 CHY INTK MANF 0150-25934
18931 LAM RESEARCH CABLE ASSY RF COAXIAL CABLE RIGHT 834-030819-018
9007 APPLIED MATERIALS FRAME SOURCE 13" 0020-20296
424 FINE SUNTRONIX POWER SUPPLY VSF150-24
13967 APPLIED MATERIALS INSULATOR,300MM HDPCVD ULTIMA 0200-00374
17812 LAM RESEARCH PCB, ESC POWER SUPPLY 810-017086-010
4681 SMC AIR SLIDE TABLE GUIDED CYLINDER MXS12-30
12259 FUJIKIN PNEUMATIC ACTUATOR BELLOWS VALVE, O.P. 0.34 ~ 0.69MPA 100087
21685 SCHNEIDER ELECTRIC BERGER LAHR STEPPING MOTOR RDM63/12 G A1
21353 LAM RESEARCH CABLE ASSY, 0.6M 684-284921-825
21499 APPLIED MATERIALS SHIELD, FILAMENT POST E17341380
21559 TERADYNE PCB ASSY, TW905 950-905-01
21061 VAT SERIES 08.1 INSERTABLE VACUUM GATE VLV DN80 08138-FA24-0001
10798 RFPP RF POWER CONTROLLER I220500001
6184 FUJIKIN MFC FCS FCS-4WS-798-F130#F
6382 FUJIKIN MFC FCS FCS-4WS-798-F50#D
19161 THK LINEAR ACTUATOR KR26
14219 THK BALL SCREW BT2005A AX-6E11
8639 EDWARDS ACTIVE GAUGE CONTROLLER D38655000
15301 APPLIED MATERIALS ASSY SENSOR WAFER SM312C V2 W/ BRACKET 0090-20105
14991 TOKYO ELECTRON PCB, CONTROL PANEL, MC-31035D, 118100053013 MC-31035D-5A
15110 TOKYO ELECTRON PCB FOR TS-4000Z CONTROL PANEL N16B-5224-0502
9477 APPLIED MATERIALS C/A HD ROT4 MTR DRIVER 0140-77636
9252 TOKYO ELECTRON PCB (TAB22A-4/PURF2-LF) 2L81-050039-41
2093 NIKON LIGHT SOURCE Z5W
11581 ALLEN-BRADLEY SLC500 OUTPUT MODULE 1746-OB16
14187 LEYBOLD VACUUM GAUGE, 206000, 15786 TR212
9945 ROFIN SHUTTER RESONATOR-EXT.1064NM SH 60 101102388
23387 AUTOMOTION LC-5 DC BL MOTOR CONTROL, ULC1, 320045 LC5AP11002
6357 HORIBA-STEC MFC SEC-Z10DW SEC-Z12DWMC
11894 SIEMENS SINUMERIK ANALOG DRIVE INTERFACE 6FC5211-0BA01-0AA4
16360 MKS THROTTLE CONTROL VALVE ,TYPE 153 153D-15973
9211 MCG SERVO MOTOR WITH ENCODER (77822-033) 2284-me3412
22290 SHIMADEN SR84 TEMPERATURE CONTROLLER SR84-1Y-N-02-0006000
7393 APTECH PRESSURE REGULATOR AP1101SH 2PW MV4 MV4
18226 APPLIED MATERIALS BLKER BAFFLE CLEAN PORT ULTIMA HDP-CVD 0020-05327
10278 FUJIKURA RF COAXIAL CABLE ASSY 6.9FT RG14A/U
10641 MATTSON RF SOURCE GENERATOR B,D,F, CABLE, 2.5M 3003080
14161 MOOG DC MOTOR C13-L19W30M10E01-020
T87 SETRA MODEL 225 PRESSURE TRANSDUCER, 0-3000 PSIG 225130CPGC42BB1
T196 SETRA PRESSURE TRANSDUCER -14.7 - 235.3PSIG 227GZ02PCE5ZZZZFT3
T197 SETRA PRESSURE TRANSDUCER -14.7 - 235.3PSIG 2271Z02PCE5ZZZZFT2
T231 SETRA PRESSURE TRANSDUCER, -14.7 - 235.3PSIG 225GZ02PCC4ZZZZR3
10943 APPLIED MATERIALS ASSY, SLIT VALVE, METAL ETCH, VITON 0010-70615
20268 APPLIED MATERIALS KIT HDWR. ISO-KF40-NW50 LL/XFER 0242-86358
4782 TURN-ACT ROTARY ACTUATOR 022-A185
6080 UNIT MFC MULTIFLO 8261 UFC-8261
3882 TDK CORPORATION POWER SUPPLY FAK05-5RO
12774 SMC HIGH VACUUM VALVE XYD-80K-M9PA
12138 FESTO COMPACT CYLINDER, STROKE 10MM, P/N: 156541 ADVU-40-10-P-A
22221 ADVANTEST PCB ASSY, AFG/AFD PC BGQ-023036
18034 MALEMA CHEM FLOW SWITCH 0.8L, AMAT PN: 0090-77332 M-200-T31-013
15930 LAM RESEARCH RF GENERATOR CABLE, 2M 684-013298-003
18392 APPLIED MATERIALS TOP RING SILICON, 200M OXIDE 0200-36697
11580 ALLEN-BRADLEY SLC500 INPUT MODULE 1746-IV16
15742 LAM RESEARCH PCB 24 CH TEMP CTL MB, 810-028296-171 853-049542-171
16297 NOVELLUS TEACH PENDANT TT2301R2-1-NES-NOVELLUS2 27-326390-00
16694 APPLIED MATERIALS FLOW SENSOR C/A, B/D/F POS, CHAMBER HX 0150-00885
2134 APPLIED MATERIALS EDIAGNOSTICS SYS INTERFACE MKS AS00348-02 BLUEBOX 4000X
7906 NOVELLUS GATE, VAT INSERT CASS W/ PERFL 60-10312-00 78510-R1
2202 RVSI NERLITE LIGHT DIFFUSING ILLUMINATOR DOAL-50-LED
4309 BRAND DISPENSETTE III, FIX, 2.0ML, BOTTLE TOP DISPENSER 4700220
20731 ADVANCED MOTION CONTROLS BRUSH TYPE PWM SERVO AMPLIFIER 12A8K
2286 OMEGA STRAIN AND PROCESS METER DP25-E-DC10/32-R
22005 APPLIED MATERIALS SERIPLEX MUX I/O PCB(1) (016H-047H) 0190-35653
14266 THERMO SCIENTIFIC IST STAGE 2ND STAGE COMPRESSOR RFT42C1E-PFZ-382
5243 ASCO RED-HAT II BRASS SOLENOID VALVE, 302373 8210G1
9633 NOR-CAL INTELLISYS IQ SERIES NC TBV-IQA-200-NW-50-S02
10969 MITSUBISHI AC SERVO DRIVER MR-J2-10A
T246 MKS PRESSURE TRANSDUCER, 100 TORR DMB12TCECJNN633
T245 MKS PRESSURE TRANSDUCER, 10 TORR 626A11TBE
12101 KEYENCE DEDICATED PARALLEL I/O CONNECTION CABLE OP-51657
11737 APPLIED MATERIALS CABLE, 24VAC, FRONT SERVICE LAMP 0150-35661
16117 APPLIED MATERIALS BLOCK,TEFLON,CHAMBER LID,GIGA-FILL SACVD 0021-10665
838 OMRON SYSMAC PROGRAMMABLE CONTROLLER C200HG-CPU53
12764 BIOMEDIA MICRO-CENTRIFUGE, 100-240VAC, 50/60HZ, 15W PC-100
1042 PURISYS CO UV LAMP BALLAST UVS-1001
12850 SANYO DENKI STEP-SYN STEPPING MOTOR, 1.5A, 0.72°/STEP 103-7501-80G1
6263 HORIBA-STEC LFC LF-F404M-A-EVD
2436 SCV KITZSCT DIAPHRAGM VALVE TD4CS-GC
10944 APPLIED MATERIALS P-5000 BWCVD WAFER LIFT 0010-10188
21749 ORIENTAL MOTOR VEXTA 2-PHASE STEPPING MOTOR PH266-01GK
11009 APPLIED MATERIALS PVD DUAL SWLL CHMBR 208V LAMP 0190-10174
336 SMC FILTER:AF40-04 x2 SS VALVE:AV4000-04-5DZC AC40-SGF266
21236 LAM RESEARCH MDL CTLR RF MATCH 9400 RFMATCH-003 (REFURB) 685-093578-003
11167 COMPACT AIR PNEUMATIC CYLINDER QJM05-4016-A
10100 APPLIED MATERIALS DC ACTUATOR, SOURCE, SIP + 200MM 0021-14587
11167 COMPACT AIR PNEUMATIC CYLINDER QJM05-4016-A
8325 MAGMOTOR SERVO MOTOR 500260037 C26-F-200X
654 SWAGELOK STAINLESS 3 WAY BALL VALVE SS-44XF4-1466
6168 UNIT MFC METAL SEAL 1660 GF100
10841 BROOKS VACUTRAN 5 MTR5 TRANSFER ROBOT DRIVE, 001-1951-06 001-7600-02
12203 SMC ROTARY ACTUATOR, 190° SWIVEL TABLE EMSQB30A
472 KEYENCE SERVO DRIVE MV-72
14273 THERMO SCIENTIFIC DISPLAY,REFRIGERATOR W/FACE & BEZEL 304863H03
50 MICRO MEMORY PCB, VME MEMORY BOARD, 94871 MM-6326AD
2709 DENSEI-LAMBDA POWER SUPPLY, 24V, 14A JWS300-24
9946 ROFIN OBJEKTIVHALTESATZ SCAN LEN 102106020
11261 VERIFLO HIGH PURITY REGULATOR, P/N: 45800483 SPR861W3P01TS12FSMTS12V
8690 APPLIED MATERIALS ROTARY HDPCVD (0020-41627, 0040-82128) 0020-98112
2455 SEEK ELECTRONICS I/O TERMINAL UNIT AS-8550SX-00
12887 FUJIKIN DIAPHRAGM VALVE, TYPE N.C., O.P. 0.34~0.69MPA 22779
22126 VEXTA 5-PHASE STEPPING MOTOR PK543AW-A44
745 SIEMENS DIGITAL OUTPUT MODULE SIMATIC S5 6ES5 440-8MA21
21735 ELECTROCRAFT TORQUEPOWER STEPPING MTR W/ BALL TPP23-90-002
21971 TOKYO ELECTRON DAMPER HANDLE EXH. CT2910-400798-11
12833 NOVELLUS CNTRL HDSIOC 0 C3SPD CONCEPT 3 SPEED FIRMWARE 4.72 02-280596-00
7641 KNIEL POWER SUPPLY CPU 5.2/VME (4022.430.14691) 310-023-02
6102 APPLIED MATERIALS MFC FC-DN780CPBA MASS FLOW CONTROLLER 3030-13113
9047 MKS PORTABLE BARATRON TRANSFER STANDARD (690A11TRA) PBTS1A11FA2
2997 METTLER TOLEDO HAUG POWER SUPPLY, 01.7906.005
B64 DRESSLER RF AUTO MATCHING, C-GUN M12 SWITCH CAP (102139962) VM1500W-CG
9944 ROFIN PRUFPROTOKOLL SHUTTER RESONATOR-EXTERN 1064NM P-101102381
5865 NOVELLUS WAFER CENTERING ASSY 02-165975-00
12065 TOKYO ELECTRON PCB ASSY FOR TS-4000Z-16 CTRL UNIT,1181-000572-19 MC-31151S
22049 APPLIED MATERIALS AC SERVO MTR BL SUPER P3 P30B04010DXS8FM 0195-00340
10169 GRANVILLE-PHILLIPS MICRO-ION PLUS GAUGE 356008-YG-T
13656 APPLIED MATERIALS HARNESS ASSEMBLY, INTERLOCK END PT DET 0140-02113
834 TYLAN GENERAL CONTROLLER, 715-180133-001 AC211A
2589 SEEK ELECTRONICS I/O TERMINAL UNIT AS-8550SX-01
21006 APPLIED MATERIALS CABLE ASSY PLATEN 4 MTR PWR REFLEXIO 0150-42155
5098 WEINTEK LABS TOUCH SCREEN PANEL MT506SV2
14856 APPLIED MATERIALS CYL AIR 1 1/8BOREZ1-1/4 STRK 3020-01093
15675 APPLIED MATERIALS O RING,14.764 ID X .275 VITON 75 DURO 0020-35712
13102 PALL ULTRAMET-L4000 FILTER ASSY, 3000 PSIG, ?" GASKET SEAL GLFF4000VM4
18814 NOVELLUS CABLE ASSY, MFC N J8, MFC N, 1.5M 03-427261-22
11672 APPLIED MATERIALS CFA BULGIN PSU OUTPUT,CABLE, 0240-97051 0150-95170
11284 MAXON MOTOR DC MOTOR W/ GEARHEAD & ENCODER, HEDS-5540 47.022.022-00.09-315
13943 ADVANCED ENERGY PE II 10K POWER SUPPLY 3157600-003
20748 JASCO PCB, POWER CONT, P/N: 6586-A510A 6586-60EIA
9505 MKS PNEUMATIC SOLENOID VALVE 100938941
4231 SMC 5-SLOT SOLENOID MANIFOLD BLOCK, VJ514MY VJ5343Y
22432 SPTS TAPPEX INSERT M6X12 266817
10576 WATLOW TEMPERATURE CONTROLLER 146E-1601-3000
1550 TEVITRONIX SEMITOOL CONTROLLER 100-30001, 27-278337-03 LC24
23289 KEYENCE DUAL DIGITAL FIBER SENSOR W/ INSTRUCTION MANUAL FS-V22R
16201 APPLIED MATERIALS CHAMBER BODY, ETCH, OXIDE, SIDE GAS FEED 0040-31942
19550 LEICA LFS AUTO FOCUS MODULE 020-650.070
752 SIEMENS POWER SUPPLY 6ES5951-7LD12
1129 FINNIGAN MAT PCB BOARD 103339
19549 OEM SPINDLER W/ BEARING 204812
20926 APPLIED MATERIALS CABLE ASSY XFR 2 PR GAUGE PRODUC 0150-42517
20967 APPLIED MATERIALS CABLE ASSY, P65 - MF PNEU, PRODUCER 0150-33207
19958 ASYST PCB ASSY, PORT LOCK, SMIF 3200-1021-01
20814 OEM PCB, LED DISPLAY 21512DES10244C2
20753 OEM PCB ASSY EE1041-381-16A
21113 LAM RESEARCH CABLE ASSY, 1.1M 833-078451-709
20313 NOVELLUS SPACER, ANODE CHAMBER, .300 15-263559-02
20299 APPLIED MATERIALS BLOCK, CHAMBER INTERFACE MOUNTING 0020-29801
20608 ESCAP DC SERVO MOTOR, HN.08.01 P310.170.50
20762 OPTIMISED CONTROL PCB ASSY, D576 KCL2871
4941 BALZERS PKR 251 COMPACT FULL RANGE GAUGE, FL-9496 BALZERS BGG26000
22444 TOKYO ELECTRON ANGLE VACUUM VALVE, CKD AVB41V-X0004 1D80-004537-11
22188 KITZ SCT PNEU V/V (IGS) JUSUNG P11104128 TD4CB-GC-1003-FA-SEP-316LE
7259 HOKUYO AUTOMATIC OPTICAL DATA TRANSMISSION DEVICE DMG-HB1
1243 TOKYO ELECTRONIC INDUSTRY CCD COLOR CAMERA CSU9001 CS9301
15249 TOKYO ELECTRON PCB, PROCESSOR BOARD, TAB113-1/I01-LF 2L81-050032-16
21799 SAIA-BURGESS STEPPER ROTARY MOTOR UFD13N01RAZ21
622 RIKEN KEIKI GAS MONITOR, RKP-62069 GP-583
11139 ANELVA VALVE, V SERIES, TYPE-L V-040LV-MMI
20571 GEN PCB ASSY 3420500300
2411 TEKTRONIX TEK PASSIVE OSCILLOSCOPE PROBE P6136
6127 UNIT MFC DIGITAL ULTRACLEAN METAL SEAL UFC-8161
19162 APPLIED MATERIALS ASP CAP FLANGE 0021-10851
13823 THERMO ELEMENTAL RF PCB, 122930-6 12293100
15055 APPLIED MATERIALS MANIFOLD WATER PL 0020-10135
4987 APPLIED MATERIALS HINGE, GENERATOR RACK, PRODUCER SE 0015-01466
6386 AERA MFC FC-785 FC-785Y-BF
4161 CKD SOLENOID VALVE AGD01R-4R
13291 APPLIED MATERIALS PCB ASSY,CHAMBER DISTRIBUTION,PROD,AS00363-03 0100-01577
9695 NSK ROBOT SERVO MOTOR W/ ASSY (51161-863-001) M-SSB020FN502
21940 TERADYNE PCB ASSY, TW997 950-997-00
16592 TEKNIC SERVO DRIVER SST-1500-103
2127 LEYBOLD THERMOVAC TM22 PIRANI CONTROLLER 89784 TM22
9393 PILZ PNOZ M1P SAFETY RELAY MODULE 773100
11203 ULVAC SUBSTRATE HEATER PSH-112MT
C0201 ENI DC PLASMA GENERATOR DCG-100 SB552 REV B DCG2D-A031100021I
18236 APPLIED MATERIALS SUPPORT BAR HEAT SHIELD ZX HEATER, 6IN 0020-25991
972 VEXTA BRUSHLESS DC MOTOR DRIVER BLD180A-MK
701 TAMARACK SCIENTIFIC LASER EQUIPMENT 500-0155
22310 SWAGELOK BELLOWS SEALED VLV GASKETED PCTFE STEM SS-8BK-1CM
11894 SIEMENS SINUMERIK ANALOG DRIVE INTERFACE 6FC5211-0BA01-0AA4
11635 BOSTON GEAR 700 SERIES GEAR SPEED REDUCER, RATIO 20:1, 0.87 H.P. F71820B5J
12850 SANYO DENKI STEP-SYN STEPPING MOTOR, 1.5A, 0.72°/STEP 103-7501-80G1
12671 TEKTRONIX TEKPROBE POWER SUPPLY 1103
3750 OMRON MAG. TACHOMETER K3TR-NB11A-C1
T96 MKS 325 MODUCELL PIRANI VACUUM TRANSDUCER 103250012
17534 BETA LASERMIKE LASER SPEED, P/N : 85143 4000-103L
11449 APPLIED MATERIALS LINER, GDP, R2 OXIDE 0020-34694
7641 KNIEL POWER SUPPLY CPU 5.2/VME (4022.430.14691) 310-023-02
10576 WATLOW TEMPERATURE CONTROLLER 146E-1601-3000
22214 ADVANTEST SAFETY CTLR MOD BLD-020100 PLD-420100BB WBL-MIF/TYPE16X02
8865 FUJI ELECTRIC FVR-C9S INVERTER FVR0.2C9S-2
6381 FUJIKIN MFC FCS FCS-4WS-798-F130#D
12833 NOVELLUS CNTRL HDSIOC 0 C3SPD CONCEPT 3 SPEED FIRMWARE 4.72 02-280596-00
15118 FUJIKIN DIAPHRAGM VALVE 65611
23404 TAMAGAWA SEIKI AC SERVO MOTOR, PN: 2-39-45543 TS3510N39E10
3862 CASCADE MICROTECH PCB COMPUTER 110-161
21964 FESTO REG VLV 162583 W/ MANOMETER PR GAUGE MA-40-10-1/8 LR-D-7-MINI
424 FINE SUNTRONIX POWER SUPPLY VSF150-24
14791 VEXTA BRUSHLESS DC MOTOR W/ FBLD40C DRIVER FBLM440C-GF
11671 APPLIED MATERIALS CABLE X5A.P6/X4H.P.S.U. 0150-95083
6330 FUJIKIN MFC FCS FCS-4WS-798-F80#F
6184 FUJIKIN MFC FCS FCS-4WS-798-F130#F
6382 FUJIKIN MFC FCS FCS-4WS-798-F50#D
19946 EMERSON MOTION CONTROL INDEXING MODULE, 960505-01 FM-2
21463 LAM RESEARCH ASSY, PWR CORD, TEMP, CNTRLR 853-034012-003
11167 COMPACT AIR PNEUMATIC CYLINDER QJM05-4016-A
22115 FAULHABER DC MINIMOTOR W/ GEARHEAD 2342S012CR
15264 BROOKS AUTOMATION END EFFECTOR, 978-262-2900 116581
12171 WITTENSTEIN STAUBLI CYBER MTR,320V,7500RPM MSSI 055G-045E-320C-1FNB-T2701
10043 TELI CCD COLOR CAMERA W/ TAMRON LENS 1:1.6 (TV0908A0) CS8420
5591 LAM RESEARCH BIMBA CYLINDER LIFTER, D-52403-A 853-011661-001
19320 NOR-CAL FITTING, TYPE HE, 4 WAY CROSS 4C-NW-25B
4161 CKD SOLENOID VALVE AGD01R-4R
11967 BOBRY AC SERVO MOTOR, 560V, P/N: 130032+OPT H3-0190-30-560/T1P-SKM36
3882 TDK CORPORATION POWER SUPPLY FAK05-5RO
13019 PERKIN ELMER PCB,FLASH LAMP DRIVER,TEP 543,TQN HH34130022A TQNHH34130023 B
7568 APPLIED MATERIALS RING CNTRLLC LID 0020-70184
752 SIEMENS POWER SUPPLY 6ES5951-7LD12
5620 ULVAC KIKO OILFREE SCROLL VACUUM PUMP DIS-251
7180 APPLIED MATERIALS FORGED 8 DXZ HEATER, HI-TEMP CERAMIC HEATER 0040-39240
9510 SEW EURODRIVE MOVITRAC B DRIVE MC07B0008-5A3-4-00
22296 JUSUNG ELECTRICAL BRAKE, PARKER HDB004, WDB 004 P55403001
11203 ULVAC SUBSTRATE HEATER PSH-112MT
17842 GRANVILLE-PHILLIPS CONVECTRON GAUGE SENSOR 275811
14380 AERA MFC ADAPTER CA-98DU-Z
1042 PURISYS CO UV LAMP BALLAST UVS-1001
424 FINE SUNTRONIX POWER SUPPLY VSF150-24
3553 ASAHI ENGINEERING PACK DRIVER STEPPING MOTOR DRIVER AK-BX551
14791 VEXTA BRUSHLESS DC MOTOR W/ FBLD40C DRIVER FBLM440C-GF
6394 AERA MFC PRIM AER, TC FC-PN981CR1BA 0190-17919
7219 APPLIED MATERIALS ENDURA ASSY STD WAFER LIFT 0010-20300
6330 FUJIKIN MFC FCS FCS-4WS-798-F80#F
852 LEADER REGULATED DC POWER SUPPLY 836-1.2
19946 EMERSON MOTION CONTROL INDEXING MODULE, 960505-01 FM-2
1661 RIKEN KEIKI ALARM BUZZER, RKP-62069 TAN-580
12105 FESTO METRIC SERIES MINI SLIDE, P/N: 544003 DGSL-16-100-Y3A
21463 LAM RESEARCH ASSY, PWR CORD, TEMP, CNTRLR 853-034012-003
11167 COMPACT AIR PNEUMATIC CYLINDER QJM05-4016-A
4380 APPLIED MATERIALS BRKT LEFT MOUNTING CHBR-MF RPG CHBR 300MM 0020-46291
22115 FAULHABER DC MINIMOTOR W/ GEARHEAD 2342S012CR
10634 YAMAHA LINEAR ACTUATOR T402BK-50
15264 BROOKS AUTOMATION END EFFECTOR, 978-262-2900 116581
12171 WITTENSTEIN STAUBLI CYBER MTR,320V,7500RPM MSSI 055G-045E-320C-1FNB-T2701
10043 TELI CCD COLOR CAMERA W/ TAMRON LENS 1:1.6 (TV0908A0) CS8420
5591 LAM RESEARCH BIMBA CYLINDER LIFTER, D-52403-A 853-011661-001
19320 NOR-CAL FITTING, TYPE HE, 4 WAY CROSS 4C-NW-25B
4161 CKD SOLENOID VALVE AGD01R-4R
13019 PERKIN ELMER PCB,FLASH LAMP DRIVER,TEP 543,TQN HH34130022A TQNHH34130023
7568 APPLIED MATERIALS RING CNTRLLC LID 0020-70184
5620 ULVAC KIKO OILFREE SCROLL VACUUM PUMP DIS-251
7180 APPLIED MATERIALS FORGED 8 DXZ HEATER, HI-TEMP CERAMIC HEATER 0040-39240
9510 SEW EURODRIVE MOVITRAC B DRIVE MC07B0008-5A3-4-00
22296 JUSUNG ELECTRICAL BRAKE, PARKER HDB004, WDB 004 P55403001
17842 GRANVILLE-PHILLIPS CONVECTRON GAUGE SENSOR 275811
14380 AERA MFC ADAPTER CA-98DU-Z
6352 HORIBA-STEC MFC SEC-Z10D SEC-Z313M
1042 PURISYS CO UV LAMP BALLAST UVS-1001
注：联系我时，请说是在“傲立机床网”上看到的，谢谢！
